Electric-field-intensity-modulated scattering as a thin-film depth probe

Publication Type

Journal Article

Date Published

11/2020

Abstract

Grazing-incidence X-ray scattering is a common technique to elucidate nanostructural information for thin-film samples, but depth-resolving this nanostructure is difficult using a single or few images. An in situ method to extract film thickness, the index of refraction and depth information using scattering images taken across a range of incident angles is presented here. The technique is described within the multilayer distorted-wave Born approximation and validated using two sets of polymer thin films. Angular divergence and energy resolution effects are considered, and implementation of the technique as a general beamline procedure is discussed. Electric-field-intensity-modulated scattering is a general technique applicable to myriad materials and enables the acquisition of depth-sensitive information in situ at any grazing-incidence-capable beamline.

Journal

Journal of Applied Crystallography

Volume

53

Year of Publication

2020
1484

Issue

6

Pagination

1484 - 1492

Short Title

J Appl Crystallography

Refereed Designation

Refereed
Laboratory 
LBNL
Type 
Analysis
Materials
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